Gas abatement

Harmful gases are generated in the manufacturing processes of various products, such as chemicals, materials, and electronic components. Gas abatement systems use a variety of methods, including combustion and catalysis, to detoxify harmful gases. Demand has been growing for gas abatement systems in recent years from the perspective of environmental protection.
EBARA offers an extensive range of gas abatement systems to suit the different types of gases to be treated and the environment of use. They include combustion models that are able to treat multiple flammable gases at a time with high efficiency, and dry models that eliminate the need for fuel supply and the disposal of wastewater. Our systems are in use in a variety of industries, including semiconductor manufacture.