Semiconductor manufacturing

Used in various processes in the manufacture of semiconductor

Details of Process

Semiconductor technology supports various devices that are indispensable in everyday life, such as computers, smartphones, home appliances, vehicles, and medical equipment. The manufacture of semiconductors requires a vast number of processes, including etching, cleaning, thin film formation, ion implantation, and flattening. These processes use cutting-edge manufacturing systems and component devices that have met strict requirements in various aspects such as performance, reliability, safety, and environmental footprint. EBARA’s industry-leading technological capabilities support semiconductor production sites that are becoming increasingly complex and more efficient every day.

Example of Use in Process

Dry Vacuum Pumps: Vacuum-based process systems used for upstream and downstream processes for semiconductors, including CVD, etching, and ion implantation

Gas Abatement Systems: Treatment of harmful gases generated in semiconductor production process

Ozonized water generator: cleaning of wafers, resist removal

CMP system: flattening

List of related products

model F-REX

High performance, high throughput for high productivity.

model EV-M

Dry vacuum pump with low power consumption, ideal for performance for high-load applications.

model TND

Combustion-type exhaust abatement system with low NOx emissions and abundant reaction byproduct measures for reduced maintenance costs.

model OZW

Achieves highly efficient and stable processing with ozonized water that has high concentration and flow rate stability.

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