Chillers

A chiller is a device used for purposes forcooling in manufacturing processes.
Chillers as introduced here ae applied as auxiliary equipment to cool semiconductor manufacturing equipment and FPD manufacturing equipment. They are used for temperature control such as stage cooling in sputtering and etching processes, and require to have highly accurate temperature stability.

As the development of our advanced information-oriented society is rapidly progressing, the load placed on semiconductor manufacturing processes is growing in response to requirements such as increased numbers of memory stacks and higher accuracy in processing. The number of equipment units, the number of chambers per unit of equipment, and the number of devices attached to manufacturing equipment are increasing. In recent years, demand for chillers that are compact, have high output, and can efficiently use space has been steadily rising. In addition, as regulations on CFCs to address the advancement of global warming are becoming stricter, requirements for environmentally friendly products are expanding as well.

The strong points of EBARA's chillers include compact sizes, high cooling output and high accuracy, so they are anticipated to be used in various fields. The use of EBARA's unique SSPD compact pump has made it possible to reduce footprint. They have a compact design with high output, can support flexible layouts in limited spaces, and can improve process stability with precise temperature control. Their use of low GWP refrigerant can reduce environmental impacts and lower the degree of risk in the event of leakage. Shorter cooling times made possible through low-temperature cooling can contribute to improvements in yield.