In recent years, countries around the world have made the declaration of achieving carbon neutrality by reducing their net GHG emissions to zero, and Japan has also set specific numerical targets. Carbon neutrality is also an important keyword in the semiconductor industry, making sustainable, environmentally friendly semiconductor manufacturing technologies more important than ever before. As a member of the global community, the EBARA Group is engaged in business activities to achieve carbon neutrality and is striving to develop environmentally-conscious products through a range of approaches.
For dry vacuum pumps, our mainstay products in the component business, we are working to reduce size, weight, and power consumption. At the same time, for exhaust abatement systems, we are reducing fuel consumption, eliminating the use of fossil fuels, and improving greenhouse gas decomposition performance to reduce environmental impact. In addition, we are also studying the effective use of resources by constructing a system to recycle hydrogen in the EUV exhaust system. In the CMP business, we are committed to reducing power consumption and utility consumption. In other business domains, we are striving to develop and expand sales of new wafer plating systems that use significantly less pure water and wafer bevel polishing equipment that does not require chemical solutions or process gases.
Our plants actively use renewable energy to reduce environmental impact. For example, the Fujisawa District has installed solar photovoltaic panels on the rooftop of the plant. The EBARA Group will continue to accelerate initiatives to achieve carbon neutrality with the aim of meeting Sustainable Development Goals (SDGs).