Dry vacuum pumps utilizing vacuum technology to create a clean environment

Dry vacuum pumps creating a vacuum environment crucial for semiconductor manufacturing

What do you imagine when you hear the word "vacuum"? You may imagine an empty state like outer space. Actually, you can see products employing vacuum technology in a broad range of spheres, from electronic devices such as smartphones and PCs, which are indispensable in our daily lives, thermos bottles used in everyday life, to particle accelerators used in cutting-edge physics experiments. Among these, a vacuum is particularly significant in the manufacture of semiconductors.

In the course of processing wafers that form the semiconductor substrate, air is removed from the processing space called a chamber using a vacuum pump to increase the degree of vacuum as much as possible in order to prevent contamination by impurities (such as gas molecules). Dry vacuum pumps developed by the Precision Machinery Company are essential to this process. They function to remove gas molecules from the chamber and because oil is not used in parts that come into contact with the gas, they create a clean vacuum without the risk of contamination due to backflow or diffusion of water or oil. We launched our dry vacuum pumps in 1986 and currently hold the second-largest market share in the world. With more than 50 service locations worldwide, our global and reliable support framework is relied upon by many companies around the world.

Related Contents