After-sales service for semiconductor manufacturing equipment

We respond quickly to problems related to equipment operation rate and maintenance, and also propose service contracts.

Our global parts stock system allows us to provide genuine consumable parts, regular replacement parts, and spare parts required for production in a timely manner.

We propose ways to continually increase the value of existing equipment through upgrade modifications that meet the needs for cutting-edge product specifications, productivity improvements, cost reductions, and other improvements.

We offer a training menu necessary for using our equipment, based on equipment operation, optional functions, and daily consumable replacement.

We sell refurbished used equipment from Ebara Group companies.